Carlos Errando-Herranz, Eva Schöll, Raphaël Picard, Micaela Laini, Samuel Gyger, Ali W. Elshaari, Art Branny, Ulrika Wennberg, Sebastien Barbat, Thibaut Renaud, Mauro Brotons-Gisbert, Cristian Bonato, Brian D. Gerardot, Val Zwiller, and Klaus D. Jöns, Resonance fluorescence from waveguide–coupled strain–localized two–dimensional quantum emitters,


Efficient on–chip integration of single–photon emitters imposes a major bottleneck for applications of photonic integrated circuits in quantum technologies. Resonantly excited solid–state emitters are emerging as near–optimal quantum light sources, if not for the lack of scalability of current devices. Current integration approaches rely on cost–inefficient individual emitter placement in photonic integrated circuits, rendering applications impossible. A promising scalable platform is based on two–dimensional (2D) semiconductors. However, resonant excitation and single–photon emission of 1 arXiv:2002.07657v3 [] 15 May 2020 waveguide–coupled 2D emitters have proven to be elusive. Here, we show a scalable approach using a silicon nitride photonic waveguide to simultaneously strain–localize single–photon emitters from a tungsten diselenide (WSe2 ) monolayer and to couple them into a waveguide mode. We demonstrate the guiding of single photons in the photonic circuit by measuring second–order autocorrelation of g(2)(0) = 0.150 ± 0.093 and perform on–chip resonant excitation yielding a g(2)(0) = 0.377±0.081. Our results are an important step to enable coherent control of quantum states and multiplexing of high–quality single photons in a scalable photonic quantum circuit.